TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Part No: 710-650099-20

Part No: 710-650099-20

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Part No: IN587-34 Installed Components

Part No: P5A869503H6T021

Part No: A61P Quantity: 2

TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Part No: 710-650099-20TEL Tokyo Electron 300mm CPL Chilling Hot Plate Process Station Lithius Working Model No: CPL Chilling Hot Plate Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components Komatsu Part No: 20001870, RCC 300 Omron Part No: E3X DA11 N (Qty. 2) TEL PCB Part No: HTE MC1 B 12, TMB2001, BOARD,CONN HPI #01 Parts List (approximation, parts may vary or not be included or installed) Assembly Part No: 5087